Pecvd System For Solar Cell Ar Coatings (Pecvd Lab-300)
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Product Specifications
| Dimensions | 1730x1027x1832 mm |
| Power | 2kW AC |
| Temperature uniformity | 2°C |
| Thickness uniformity | <2% |
| Cycle time | <15 min |
| Throughput | 21600 wafers/year |
| Pump type | Dry & Turbo |
| Features | High throughput, Uniform coating, Fast cycle time, Automated system, Precise control, Small footprint, Easy operation, Reliable process |
Product Overview
Key Features
Capacitively-Coupled PECVD system with loadlock chamber for R&D and small scale production.
Automatic loadlock system with cassette.
Uniform gas distribution through shower head.
Specifications
Substrate temperature uniformity : a A 2A C @400A C within 6"
Thickness uniformity of deposited layers : Cycle time : <15mins
Average throughput : Up to 21,600 wafers per year
Dimension : 1,730L A 1,027H A 1,832W (mm3)
Power : AC 2kW (13.56MHz) VHF & MF Power compatible
Gas : NF3/O2/H2/SiH4/N2/NH3/N2O/Ar
Substrate material : Si wafer
Pump : Dry(1,200l/min & 200l/min) & turbo(600l/s)
Company Details
Focusing on a customer-centric approach, A-Tech System has a pan-India presence and caters to a huge consumer base throughout the country. Buy Industrial Automation in bulk from A-Tech System at Trade India quality-assured products.
Business Type
Manufacturer, Supplier
Establishment
1995
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Seller Details
Incheon, Incheon
Mr. Yoon Choi
Address
175-25 Cheongcheon-Dong 2, Bupyeong-Gu, Incheon, Incheon, 403-853, Korea South
Industrial Automation in Incheon
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