Pecvd System For Low Temp. Cnts Synthesis (Pecvd Lab-100-n)
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Product Specifications
| Features | Low Temp, High Throughput, Precise Control, Versatile Gases, Silicon Carbide, Rotary Pump |
Product Overview
Key Features
Heating range : 400 ~ 600A C
Average throughput : Up to 5,000 wafers per year
Wafer capacity : 1 A 4"
Dimension : 1,100L A 1,500H A 900W (mm3)
Power : AC 100W (13.56MHz)
Gas : NH3/C2H2/Ar/O2/N2
Heater : silicon carbide(heating rate: 40A C/min, max. temp.:850A C, deviation: negligible)
Pump : rotary(600 l/min)
Company Details
Focusing on a customer-centric approach, A-Tech System has a pan-India presence and caters to a huge consumer base throughout the country. Buy Industrial Automation in bulk from A-Tech System at Trade India quality-assured products.
Business Type
Manufacturer, Supplier
Establishment
1995
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Seller Details
Incheon, Incheon
Mr. Yoon Choi
Address
175-25 Cheongcheon-Dong 2, Bupyeong-Gu, Incheon, Incheon, 403-853, Korea South
Industrial Automation in Incheon
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