
High Density Plasma Etching System For Magnetic Materials (Etcher-100m)
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Product Specifications
Features | High Throughput, Precise Etching, Material Compatibility, Process Control |
Product Overview
Key Features
Average throughput : Up to 14,400 wafers per year
Wafer capacity : 1 A 4"
Dimension : 1,100L A 1,830H A 900W (mm3)
Power : RF 1kW for TCP source
RF 600W for bias voltage
Gas : C2F6 / He / SF6 / B6H6 / Cl2/Ar
Substrate material : Si/SiO2
Pump : Rotary(450l/min, 900l/min) & Turbo(500l/s)
Company Details
Focusing on a customer-centric approach, A-Tech System has a pan-India presence and caters to a huge consumer base throughout the country. Buy Industrial Supplies-General in bulk from A-Tech System at Trade India quality-assured products.
Business Type
Manufacturer, Supplier
Establishment
1995
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Seller Details
Incheon, Incheon
Mr. Yoon Choi
Address
175-25 Cheongcheon-Dong 2, Bupyeong-Gu, Incheon, Incheon, 403-853, Korea South
Industrial Supplies-General in Incheon
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