
Icp-rie System For Nano-patterning (Etch-200)
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Product Overview
Key Features
Dimension : 1,370L A 1,970.2H A 931W (mm3)
Wafer capacity : 1 A 4", 1 A 6"
Heater : 6", -60A C LN2 Cooling
Exhaust : Wet Scrubber 1,200SLM
Gas Cabinet : 2set
Power : AC 2kW (13.56MHz)
Gas : CHF3/O2/CL2/SF6/Ar
Pump : Dry(1,200 l/min & 200 l/min) & TMP(1,000 l/sec)
Company Details
Focusing on a customer-centric approach, A-Tech System has a pan-India presence and caters to a huge consumer base throughout the country. Buy Industrial Supplies-General in bulk from A-Tech System at Trade India quality-assured products.
Business Type
Manufacturer, Supplier
Establishment
1995
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Seller Details
Incheon, Incheon
Mr. Yoon Choi
Address
175-25 Cheongcheon-Dong 2, Bupyeong-Gu, Incheon, Incheon, 403-853, Korea South
Industrial Supplies-General in Incheon
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