Icp-rie System For Nano-patterning (Etch-200)
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Product Specifications
| Dimensions | 1370x1970x931 mm |
| Exhaust | Wet Scrubber |
| Features | Nano-patterning, High precision, Versatile, Efficient etching, Easy operation, Reliable system, Cost effective |
| Gas Cabinet | 2 sets |
| Heater | 6", -60 C |
| Power | AC 2kW |
| Pump | Dry & TMP |
| Wafer capacity | 1 4", 1 6" |
Product Overview
Key Features
We are offering our customers a wide range of ICP-RIE System For Nano-Patterning (Etch-200), which are available following Specifications :-
Dimension : 1,370L A 1,970.2H A 931W (mm3)
Wafer capacity : 1 A 4", 1 A 6"
Heater : 6", -60A C LN2 Cooling
Exhaust : Wet Scrubber 1,200SLM
Gas Cabinet : 2set
Power : AC 2kW (13.56MHz)
Gas : CHF3/O2/CL2/SF6/Ar
Pump : Dry(1,200 l/min & 200 l/min) & TMP(1,000 l/sec)
Dimension : 1,370L A 1,970.2H A 931W (mm3)
Wafer capacity : 1 A 4", 1 A 6"
Heater : 6", -60A C LN2 Cooling
Exhaust : Wet Scrubber 1,200SLM
Gas Cabinet : 2set
Power : AC 2kW (13.56MHz)
Gas : CHF3/O2/CL2/SF6/Ar
Pump : Dry(1,200 l/min & 200 l/min) & TMP(1,000 l/sec)
Company Details
Established in 1995, A-Tech System has made a name for itself in the list of top suppliers of Industrial Supplies-General in India. The supplier company is located in Incheon, Incheon, and is one of the leading sellers of listed products.
A-Tech System is listed in Trade India's list of verified sellers offering supreme quality of Arc Ion Plating System (Vacuum Arc Pilot-12H), CNT Yarn Winder, Cluster System For PECVD Silicon Layer (Cluster CVD-300), etc. Buy Industrial Supplies-General in bulk from us for the best quality products and service.
A-Tech System is listed in Trade India's list of verified sellers offering supreme quality of Arc Ion Plating System (Vacuum Arc Pilot-12H), CNT Yarn Winder, Cluster System For PECVD Silicon Layer (Cluster CVD-300), etc. Buy Industrial Supplies-General in bulk from us for the best quality products and service.
Business Type
Manufacturer, Supplier
Establishment
1995
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Seller Details
Incheon, Incheon
Name
Mr. Yoon Choi
Address
175-25 Cheongcheon-Dong 2, Bupyeong-Gu, Incheon, Incheon, 403-853, Korea South
Industrial Supplies-General in Incheon
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