Thermal Cvd System For Uniform Sic Coating (Cvd Lab1200)
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Product Specifications
| Heating range | 1200 C |
| Throughput | 20,000 wafers |
| Dimensions | 1558x1520x800 mm |
| Power | 220V, 100A |
| Gases | H2/C3H8/Ar/MTS |
| Furnace heater | A1 |
| Pump | Rotary |
| Features | Uniform coating, PC control, Easy setup, Safe scrubber, High sensitivity, Three heating zones, High throughput |
Product Overview
Key Features
Following are the Main Features of Thermal CVD System For Uniform SiC Coating (CVD Lab1200) :-
Thermal CVD system for SiC coating with MTS bubbler system.
PC control based on PLC.
Convenient Al2O3 tube setup.
Ion exchange type scrubber for SiH4 and Cl gases.
High sensitivity gas detectors for H2, Cl, C3H8.
Uniform 3 heating zone.
Specifications Heating range ~ 1200A C
Specifications
Average throughput : Up to 20,000 wafers per year
Dimension: 1,558L A 1,520H A 800W (mm3)
Power: 220V, 100A Gas : H2/C3H8/Ar/MTS (99%)
Furnace heater :A1(heating rate: 30A C/min, max. temp.: 1,400A C, deviation: A 5A C)
Pump : Rotary(600 l/min)
Thermal CVD system for SiC coating with MTS bubbler system.
PC control based on PLC.
Convenient Al2O3 tube setup.
Ion exchange type scrubber for SiH4 and Cl gases.
High sensitivity gas detectors for H2, Cl, C3H8.
Uniform 3 heating zone.
Specifications Heating range ~ 1200A C
Specifications
Average throughput : Up to 20,000 wafers per year
Dimension: 1,558L A 1,520H A 800W (mm3)
Power: 220V, 100A Gas : H2/C3H8/Ar/MTS (99%)
Furnace heater :A1(heating rate: 30A C/min, max. temp.: 1,400A C, deviation: A 5A C)
Pump : Rotary(600 l/min)
Company Details
A-Tech System, Established in 1995 at Incheon in Incheon, is a leading Manufacturer,Supplier of Industrial Supplies-General in Korea South. A-Tech System is one of Trade India's verified and trusted sellers of listed products. With extensive experience in supplying and trading Thermal Cvd System For Uniform Sic Coating (Cvd Lab1200), A-Tech System has made a reputed name for itself in the market with high-quality Arc Ion Plating System (Vacuum Arc Pilot-12H), CNT Yarn Winder, Cluster System For PECVD Silicon Layer (Cluster CVD-300), etc.
Focusing on a customer-centric approach, A-Tech System has a pan-India presence and caters to a huge consumer base throughout the country. Buy Industrial Supplies-General in bulk from A-Tech System at Trade India quality-assured products.
Focusing on a customer-centric approach, A-Tech System has a pan-India presence and caters to a huge consumer base throughout the country. Buy Industrial Supplies-General in bulk from A-Tech System at Trade India quality-assured products.
Business Type
Manufacturer, Supplier
Establishment
1995
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Seller Details
Incheon, Incheon
Mr. Yoon Choi
Address
175-25 Cheongcheon-Dong 2, Bupyeong-Gu, Incheon, Incheon, 403-853, Korea South
Industrial Supplies-General in Incheon
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