
Cluster System For Pecvd Silicon Layer (Cluster Cvd-300)
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Product Overview
Key Features
Wafer capacity : 1 A 4"
Average throughput : Up to 5,000 wafers per year
Dimension : 2,100L A 1,700H A 1,300W (mm3)
Power : AC 600W (13.56MHz)
Gas : H2/SiH4/PH3/B2H6
Heater : silicon carbide(heating rate: 40A C/min, max.
temp : 850A C, deviation: negligible)
Pump : rotary(600 l/min) & turbo(500 l/s)
Company Details
Focusing on a customer-centric approach, A-Tech System has a pan-India presence and caters to a huge consumer base throughout the country. Buy Industrial Supplies-General in bulk from A-Tech System at Trade India quality-assured products.
Business Type
Manufacturer, Supplier
Establishment
1995
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Seller Details
Incheon, Incheon
Mr. Yoon Choi
Address
175-25 Cheongcheon-Dong 2, Bupyeong-Gu, Incheon, Incheon, 403-853, Korea South
Industrial Supplies-General in Incheon
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