Pbz Edge Measurement Sensors

PBZ Edge Measurement Sensors are specialized for edge-position measurement of film wafer or glass substrate by means of parallel laser beams and a CMOS linear image sensor.
* Integrated FDN algorithm High-accuracy edge measurement*1
* Linear image sensor system with light intensity drop detection Incorporates an effective countermeasure against the buildup of foreign matter on the sensing face previously a major problem for reliable detection.
* Integrated algorithm for detection of transparent objects Transparent objects can be reliably measured.
* Standard 2-channel input controller Handles calculations for two inputs reducing wiring man-hours and saving space
* RS-485 communications (for the PBC-201VN2/PBC-203VN2) Data can be transmitted to a PLC or touch panel
* Safety JIS Class 1 laser beam. No particular protective measures required.
* Multiple functions Noise cancellation function for ignoring projections on films*2
* Computation of I for glass substrate alignment*3
* Displacement detection for identifying cracks on grass substrates*3