Metal Plasma Surface Treatment System Tetra 320r

Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Tretra 320R low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of approx. 320 litres of this plasma system offers enough space to serve series production / automation.

Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised.

Fields of application:
VOC-free cleaning of organic residues on silicone, plastic, copper, nickel, ...
Activation before painting, gluing, potting, ...
Etching of PTFE, photoresist, oxide layers, ...
Super-hydrophobic and -hydrophilic coatings

Main features:
Floor-standing enclosure
Vacuum chambers: Aluminium
Chamber volume: approx. 320 litres
Gas supply: Mass Flow Controllers (MFCs)
Generator frequencies: 80 kHz (0 - 3000)
Controls: Full PC control (Windows 10 IoT)
Pressure measurement: Pirani, capacity manometer