Nano Low-pressure Plasma System - Stainless Steel 18-24 L Chamber Volume | Automatic Low Noise Vacuum Technology

Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Nano low-pressure plasma system you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of 18 up to 24 litres of this plasma system offers enough space to serve laboratory and also series production.

Plasma treatment in low-pressure plasma is a proven technique for controlled ultra-fine cleaning improvement of adhesion (activation and etching) and coating of thin layers on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process the process gas introduced there is ionised.

Fields of application:
VOC-free cleaning of organic residues on silicone plastics copper nickel ...
Activation before painting gluing potting ...
Etching of PTFE photoresist oxide layers ...
Super-hydrophobic and -hydrophilic coatings.

Main features:
Benchtop or floor-standing
Vacuum chambers: Stainless steel aluminium borosilicate or quartz glass
Chamber volume: 18 - 24 litres
Gas supply: Mass flow controllers (MFCs)
Generator frequencies: 100 kHz (0 - 500 W) 80 kHz (0 - 1000 W) 13.56 MHz (0 - 300 W) 2.45 GHz (0 - 600 W)
Controls: Semi-automatic rotary switch basic PC control (Windows CE) full PC control (Windows 10 IoT)
Pressure measurement: Pirani capacitance manometer