Icp Etch System Plasmapro 100 Cobra
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Product Specifications
| Platform Size | 200mm |
| Temperature Range | -150°C to 400°C |
| Wafer Capacity | Single/Multi |
| Cleaning | In-situ |
| Usage | Semiconductor etching and deposition |
| Material | Metal/Ceramic |
| Footprint | Compact |
| Features | High throughput, High precision, Ease of use, Low cost, Compact design, Wide temperature, 200mm platform |
Product Overview
Key Features
The PlasmaPro 100 range of etch and deposition tools can be fitted with a variety of substrate electrodes, enabling processes over a wide temperature range. They offer a 200mm platform with single wafer and multi-wafer batch capability. The process modules offer excellent uniformity, high throughput and high precision processes.
Wide temperature range electrode, -150A C to 400A C
Compatible with all wafer sizes up to 200mm
Rapid change between wafer sizes
Low cost of ownership and ease of serviceability
Compact footprint, flexible layout
In-situ chamber cleaning and end-pointing
Company Details
Focusing on a customer-centric approach, OXFORD INSTRUMENTS INDIA PVT. LTD. has a pan-India presence and caters to a huge consumer base throughout the country. Get Scientific Instruments from OXFORD INSTRUMENTS INDIA PVT. LTD. at Trade India quality-assured services.
Business Type
Manufacturer, Service Provider, Distributor, Supplier
Employee Count
11
Establishment
2012
Working Days
Monday To Sunday
GST NO
27AABCO6283B1ZK
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Seller Details
GST - 27AABCO6283B1ZK
Mumbai, Maharashtra
Accepts only Domestic inquiries
Marketing Manager
Mr Abhijat Saklani
Address
Unit No - 11, Marwah's Complex, Krishnalal Marwah Marg, Mumbai, Maharashtra, 400072, India
orp electrodes in Mumbai
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