Plasmapro 100 Estrelas

For the diverse requirements of our clients, we are engaged in manufacturing and supplying a wide array of PlasmaPro 100 Estrelas in Mumbai, Maharashtra, India. The PlasmaPro 100 Estrelas platform is designed to give total flexibility for Deep Silicon Etch (DSiE) applications - serving a diverse set of process requirements across the Micro Electro Mechanical Systems (MEMS), Advanced Packaging and Nanotechnology markets. Developed with both the research and production markets in mind, the PlasmaPro 100 Estrelas offers the ultimate in process flexibility.
Smooth sidewall processes
High etch cavity etches
High aspect ratio processes
Tapered via etches
Wide range of applications
Mechanical or electrostatic clamping
Heated liners
Improved reproducibility
Increased mean time between cleans (MTBC)