Plasmapro 100 Ale

With sincerity and hard work, we have carved a niche for ourselves in this domain by manufacturing and supplying a fine quality of PlasmaPro 100 ALE in Mumbai, Maharashtra, India. The PlasmaPro 100 range of etch and deposition tools can be fitted with a variety of substrate electrodes, enabling processes over a wide temperature range. They offer a 200mm platform with single wafer and multi-wafer batch capability. The process modules offer excellent uniformity, high throughput and high precision processes.

High quality films
Wide temperature range electrode
Compatible with all wafer sizes up to 200mm
Rapid change between wafer sizes
Low cost of ownership and ease of serviceability
Compact footprint, flexible layout
Resistive heated electrodes with capability up to 400A C or 1200A C
In-situ chamber cleaning and end-pointing