
Plasmapro 100 Ale
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Product Specifications
| Platform Size | 200mm |
| Wafer Capacity | Single/Multi |
| Temperature Range | 400°C/1200°C |
| Electrode Type | Resistive heated |
| Process Capability | Etch/Deposition |
| Usage | Plasma etching and deposition of wafers up to 200mm |
| Chamber Cleaning | In-situ |
| Features | High throughput, High precision, Wide temperature, Low cost, Compact footprint, Easy serviceability, 200mm platform, In-situ cleaning |
Product Overview
Key Features
High quality films
Wide temperature range electrode
Compatible with all wafer sizes up to 200mm
Rapid change between wafer sizes
Low cost of ownership and ease of serviceability
Compact footprint, flexible layout
Resistive heated electrodes with capability up to 400A C or 1200A C
In-situ chamber cleaning and end-pointing
Company Details
Focusing on a customer-centric approach, OXFORD INSTRUMENTS INDIA PVT. LTD. has a pan-India presence and caters to a huge consumer base throughout the country. Get Scientific Instruments from OXFORD INSTRUMENTS INDIA PVT. LTD. at Trade India quality-assured services.
Business Type
Manufacturer, Service Provider, Distributor, Supplier
Employee Count
11
Establishment
2012
Working Days
Monday To Sunday
GST NO
27AABCO6283B1ZK
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Seller Details
GST - 27AABCO6283B1ZK
Mumbai, Maharashtra
Accepts only Domestic inquiries
Marketing Manager
Mr Abhijat Saklani
Address
Unit No - 11, Marwah's Complex, Krishnalal Marwah Marg, Mumbai, Maharashtra, 400072, India
Scientific Instruments in Mumbai
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