Atomic Layer Deposition (Ald) System Flexal

As a leading organization, we are engaged in manufacturing and supplying a quality range of Atomic Layer Deposition (ALD) System FlexAL in Mumbai, Maharashtra, India. The FlexAL systems provide a new range of flexibility and capability in the engineering of nanoscale structures and devices by offering remote plasma atomic layer deposition (ALD) processes and thermal ALD within a single ALD system.
Remote plasma & thermal ALD in one flexible tool
Clusterable for vacuum transfer of substrates
Cassette to cassette handling increases throughput suitable for production
Maximum flexibility in the choice of materials & precursors
Low-temperature processes enabled by plasma ALD
Low damage maintained by the use of remote plasma
Controllable, repeatable processes via recipe-driven software interface
Ability to handle up to 200mm wafer