Rapid Thermal Processor As-micro

With our vast industrial experience, we are indulged in manufacturing and supplying a quality array of Rapid Thermal Processor AS-Micro in Montpellier, Herault, France.

Three-inch rapid thermal processor with vacuum capability dedicated to research applications
Sample size: few square millimeters up to 3-inch
Optional 3-inch susceptor for 2-inch sample
Quartz tube with stainless steel flanges process chamber
Tubular infrared halogen lamps furnace.
Up to 1250A C. Very fast ramp rates (> 250A C/s)
Horizontal motion door with quartz tray for easy loading and unloading of the wafers and thermocouple installation.
Thermocouple temperature measurement and the fast digital PID temperature controller assure high and stable temperature control across the temperature range.
Optional pyrometer control.
Optional twin chamber to manage cross-contamination.