As-master System

We are producing and supplying a wide range of AS-Master System to our clients. This can process wafers up to 200 mm diameter. The system can receive a susceptor with a maximum outer diameter of 240 mm for processing 200 mm wafers.
The AS-Master systems have been specially developed to meet the requirements of universities, research laboratories, quality control and small-scale production.
The high reliability guarantees low cost of ownership.
A high temperature halogen lamp furnace is available as an optional feature. This furnace allows processing up to 1500A C.
The system has a stainless steel water-cooled chamber. The cold wall chamber technology provides significant advantages:
a c High process reproducibility
a c Low memory effect
a c Higher cooling rates
a c Ultra clean and contamination-free environment
The AS-Master can receive a temperature controlled double quartz window and all necessary features to perform RTCVD processes. This technology allows keeping the quartz window at low temperature in order to reduce the deposition on the window and reduce the number of cleaning cycles for CVD applications.
A sample rotation option is available to improve the process uniformity. It allows rotation speed up to 100 rpm.
The cross lamp furnace with multi zone control provides enhanced temperature uniformity.