As-premium Rapid Thermal Processing System

We are manufacturing and supplying of AS-Premium Rapid Thermal Processing System to our patrons. The AS-Premium system can process samples up to 200 mm diameter. The machine has been specially developed to meet the requirements of universities, research laboratories, quality control and small-scale production.
The high reliability guarantees low cost of ownership and allows small scale production up to 10,000 wafers per year.
Both pyrometer and thermocouple temperature measurements are standard features. The fast digital PID temperature controller provides high temperature reproducibility (A 1A C). The system assures accurate and repeatable thermal control across the temperature range.
The design of the process chamber allows connection to a cluster tool or a glove box (option).
The RTP system can receive a turbo molecular pumping unit in order to provide ultra clean process environment.
Silicon carbide coated graphite susceptors are available for processing of compound semiconductor and small samples. The design of susceptor and process chamber allows enhanced temperature control and process uniformity.