Automatic Optical Inspection System

High-resolution inspection of advanced substrates and high-density (HDI) panels generates tremendous amounts of data. The Orion FL AOI system delivers unparalleled detection ability for leading-edge technology down to 15-um line width. The combination of enhanced optics, specially-optimized for high magnification and intense illumination with powerful processing engine enables fast inspection of micron-scale details.

Performance Features :
# Proprietary optical block enhances contrast for improved detection of shallow shorts
# TDE (Turbo Detection Engine) Camtek's dedicated detection hardware handles vast quantities of image data at high speeds
# Superb detection ability through implementation of three methodologies Design Rule Check, Template Matching and Morphologic
# CMTS (Camtek's Morphological Tracking System patent pending) enhances detection robustness and facilitates setup through analysis of conductor and laminate shapes
# OLR (On-Line Registration) improves detection and eliminates false alarms related to panel dimensional variations