Variable Angle Laser Ellipsometer - Electronics Allied Equipment, 0.1 Resolution, Matte Black | High Sensitivity, Non-destructive Thin Film Metrology

Ellipsometry is a very sensitive optical technique which provides unequaled capabilities for thin film metrology. Ellipsometry exploits phase information and polarization state of light and so can achieve angstrom level resolution. The main advantages of ellipsometry are its non-destructive character, high sensitivity and wide measurement range. The optical parameters like thickness and refractive indices of a thin film can be determined precisely by this technique.

In the ellipsometer model no: HO-ED-P-06, a circularly polarized light is made incident on the test substrate and the reflected light which is linearly polarized is analyzed for polarization changes.

The instrument consists of two concentrically rotating arms around a precisely graduated disc fixed to a heavy base. A laser source is held on one arm and the detector assembly on the other arm. The graduated disc has 1A scale and 0.1A resolution achieved through a vernier. Power supplies for laser source and detector are placed separately. Polarizer, analyzer and quarter wave plate are held in precision rotary stages in the optical path with precise graduations having 0 - 360A range and 0.1A resolution. Glan-Thompson Prisms are used for both polarizer and analyzer.