Tmfc50v Mass Flow Controller - Sus316 Material, Flow Range: 10sccm~50slm | Accuracy: 1.0% Fs, Fast Response, High Stability, Corrosion Resistance

Following Features of TMFC50V Mass Flow Controller :

a c High accuracy, low flow
a c Fast response (a 1.0)
a c Wide pressure range (1300 psig) the following
a c No leakage
a c do not have the temperature or pressure
a c Connect a compatible
a c High stability of mobile sensor
a c Corrosion resistance value
a c Excellent linearity
a c Excellent long-term stability
a c Modular design
a c Compact Flow Control Systems
Model
TMFC30V
TMFC30A
TMFC50V
TMFC50A

FlowRange(N2)
10sccm~30SLM
10sccm~30SLM
10scc~50SLM
10scc~50SLM

Response Time : a 1.0 sec
Accuracy : A 1.0 % FS
Repeatability : A 0.25 % FS
Proof Pressure : 1300 PSIG
Leak rate : 1 x 10-9 atm.cc/sec or less
Workingtemperature Range : 0~50a
Materials of parts in contact w/gases
Body: SUS316
Valve seat: Vitiona c(Option Buraa cor Kalreza cor PTFEa c)
Joint : Standard:1/4 compression
Option: 1/8 compression,1/4 VCRa c,3/8 Compression,VCRa c
Electrical connections
Dsub 15-pin male connector per standards

Flow rate input signals
0~5 Vdc
4~20mA
0~5 Vdc
4~20mA

Flow rate output signals
0~5 Vdc
4~20mA
0~5 Vdc
4~20mA

required power supply
i 15~28 Vdc/350mA