
Plasma Enhanced Rotational Pecvd System
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Product Specifications
Max Temp | 1200 C |
Heating Zone | 440 Mm |
Tube Size | 60*420 Mm |
Rotation Rate | 3~13R/Min |
Signal Frequency | 13.56 Mhz |
Power Output | 0-500 W |
Vacuum Degree | 10-1 Pa |
Features | High Temp, Adjustable Angle, Precise Control, Stable Power, Vacuum Unit |
Product Overview
Key Features
Max. Temp : 1200A C
Heating Zone Length : 440 mm
Constant Zone Length : 200 mm
Tube Size : I 60*420+I 100*360+I 60*420 mm
Furnace Body Inclination Angle : 0~35A i Adjustablei
Furnace Tube Rotation Rate : 3~13r/min
PE source
Signal Frequency : 13.56 MHzA 0.005%
Power Output Range : 0-500 W
Max. Reflection Power : 100 W
RF Output Interface : 50 IC, N-Type, Female
Power stability : a 5W
Accuracy : A 1.5%
Response Accuracy : A 0.2%
Response Time Gas Characteristics i 1i 4 sec
Electrical Characteristics i 10 Sec
Working Pressure Difference Range : 0.1i 0.5 MPa
Max. Pressure : 3 MPa
Connection : I 6 mm Double Clasp Stainless Steel Joint
Vacuum Unit : KF25 Series Bellows And Manual Stopper Valves
Vacuum Degree : 10-1 pa
Company Details
Focusing on a customer-centric approach, Anhui BEQ Equipment Technology Co.Ltd. has a pan-India presence and caters to a huge consumer base throughout the country. Buy Furnace Manufacturers in bulk from Anhui BEQ Equipment Technology Co.Ltd. at Trade India quality-assured products.
Business Type
Exporter, Manufacturer, Supplier
Working Days
Monday To Sunday
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Seller Details
Hefei, Anhui Province
Beq
Address
Huashan Industrial Park, Chaohu District, Hefei, Anhui Province, China
vacuum furnaces in Hefei
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