Plasma Enhanced Rotational Pecvd System
Product Overview
Key Features
Max. Temp : 1200A C
Heating Zone Length : 440 mm
Constant Zone Length : 200 mm
Tube Size : I 60*420+I 100*360+I 60*420 mm
Furnace Body Inclination Angle : 0~35A i Adjustablei
Furnace Tube Rotation Rate : 3~13r/min
PE source
Signal Frequency : 13.56 MHzA 0.005%
Power Output Range : 0-500 W
Max. Reflection Power : 100 W
RF Output Interface : 50 IC, N-Type, Female
Power stability : a 5W
Accuracy : A 1.5%
Response Accuracy : A 0.2%
Response Time Gas Characteristics i 1i 4 sec
Electrical Characteristics i 10 Sec
Working Pressure Difference Range : 0.1i 0.5 MPa
Max. Pressure : 3 MPa
Connection : I 6 mm Double Clasp Stainless Steel Joint
Vacuum Unit : KF25 Series Bellows And Manual Stopper Valves
Vacuum Degree : 10-1 pa
Company Details
Focusing on a customer-centric approach, Anhui BEQ Equipment Technology Co.Ltd. has a pan-India presence and caters to a huge consumer base throughout the country. Buy Furnace Manufacturers in bulk from Anhui BEQ Equipment Technology Co.Ltd. at Trade India quality-assured products.
Business Type
Exporter, Manufacturer, Supplier
Working Days
Monday To Sunday
Seller Details
Anhui BEQ Equipment Technology Co.Ltd.
Name
beq
AddressView on Map
Huashan Industrial Park, Chaohu District, Hefei, Anhui Province, China
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