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Plasma Enhanced Rotational Pecvd System
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Plasma Enhanced Rotational Pecvd System

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Product Specifications

Max Temp1200 C
Heating Zone440 Mm
Tube Size60*420 Mm
Rotation Rate3~13R/Min
Signal Frequency13.56 Mhz
Power Output0-500 W
Vacuum Degree10-1 Pa
FeaturesHigh Temp, Adjustable Angle, Precise Control, Stable Power, Vacuum Unit

Product Overview

Key Features

Type : Plasma Enhanced Rotational PECVD System
Max. Temp : 1200A C
Heating Zone Length : 440 mm
Constant Zone Length : 200 mm
Tube Size : I 60*420+I 100*360+I 60*420 mm
Furnace Body Inclination Angle : 0~35A i Adjustablei
Furnace Tube Rotation Rate : 3~13r/min
PE source
Signal Frequency : 13.56 MHzA 0.005%
Power Output Range : 0-500 W
Max. Reflection Power : 100 W
RF Output Interface : 50 IC, N-Type, Female
Power stability : a 5W
Accuracy : A 1.5%
Response Accuracy : A 0.2%
Response Time Gas Characteristics i 1i 4 sec
Electrical Characteristics i 10 Sec
Working Pressure Difference Range : 0.1i 0.5 MPa
Max. Pressure : 3 MPa
Connection : I 6 mm Double Clasp Stainless Steel Joint
Vacuum Unit : KF25 Series Bellows And Manual Stopper Valves
Vacuum Degree : 10-1 pa

Company Details

Anhui BEQ Equipment Technology Co.Ltd., Registered in 2019 at Hefei in Anhui Province, is a leading Exporter,Manufacturer,Supplier of Furnace Manufacturers in China. Anhui BEQ Equipment Technology Co.Ltd. is one of Trade India's verified and trusted sellers of listed products. With extensive experience in supplying and trading Plasma Enhanced Rotational PECVD System, Anhui BEQ Equipment Technology Co.Ltd. has made a reputed name for itself in the market with high-quality Mini Muffle Furnace (1L) MF-1100C-S, Multi-station Tube Furnace- BTF-1100C-S, Plasma Enhanced Rotational PECVD System, etc.
Focusing on a customer-centric approach, Anhui BEQ Equipment Technology Co.Ltd. has a pan-India presence and caters to a huge consumer base throughout the country. Buy Furnace Manufacturers in bulk from Anhui BEQ Equipment Technology Co.Ltd. at Trade India quality-assured products.

Business Type

Exporter, Manufacturer, Supplier

Working Days

Monday To Sunday

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Seller Details

Hefei, Anhui Province

Beq

Address

Huashan Industrial Park, Chaohu District, Hefei, Anhui Province, China

vacuum furnaces in Hefei

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