Mask Aligner-mda-60ms

Following are the Main Standard Features of Mask Aligner-MDA-60MS :-
1) Semi Auto System
- Auto exposure, Leveling and Z axis Stage motion
- Manual Alignment
2) PC & PLC Controller
3) Beam size : 10.25" x 10.25"
4) Sample Size : 156 x 156 mm
5) Wafer Stage : X,Y,Z and I 4 Axis motion
Z, I Axis motorize
6) Auto leveling of mask and sample
7) Mask size : up to 9"x 9"
8) 1 KW UV Power Supply and 1 KW UV lamp
9) Dual CCD zoom microscope and 19" LCD Monitor
10) Anti-Vibration Table
11) Oil-less Vacuum Pump
12) Dimension(mm) :
1400mm*1100mm*1532mm[W*D*H]

System Specification
1) Light Source Module
- 1 KW UV Lamp & 1KW Power supply
- Wavelength : NUV 350nm ~ 450nm
- 365nm Max. Intensity : max >30 mw/cm2
- Max. Beam Size : 10.25" x 10.25"
-Beam Uniformity : a A 5%

2) Microscope Module
Top side Microscope
- Dual CCD zoom Microscope
- Manual moving stage : X, Y, Z
- Objective spacing : 60 ~ 200
- Move range : Y Axis A 20 mm
- 19" LCD Monitor
- Magnification : 80x ~ 1000x
- Working distance : 86 mm / 32 mm
- Field of View : 6,9 mm ~ 0.03 mm
- Depth of Field : 2.98 mm ~ 0.03 mm

3) Stage and Controller Module
- Exposure Time: 1 ~ 999.9 sec
- Stage movement: X,Y,Z and Theta
X, Y : A 5 mm, Theta :A 4A , Z : 15mm
- Exposure Modes
Vacuum Contact
Pressure Contact: Hard / Soft
Proximity Gap : 10 ~ 1000um
- Alignment Accuracy :
TSA : < A 1 um ( @ Thin PR 1.2um )