Spin Coater - 0-6,000 Rpm Speed, 20 Programmable Processes | Advanced Lcd Touch Screen, Vacuum Chuck Interlock, Optional Auto Dispensing Unit

Loaded with vast industrial knowledge and expertise, we have emerged as a major Exporter, Manufacturer & Distributor of Spin Coater in Anyang-Si, Kyonggi-do, Korea South.
LCD touch screen
a c20 process programs
a c20 steps per program (Upgradeable with software option)
a c0.1 second resolution for step times
a cAcceleration and deceleration settable by 0.1 second resolution(programmable ramp)
a cSpin speed 0 - 6,000 rpm
a cSpin speed acceleration:
a 0 - 30,000 rpm/sec unloaded
a 0 - 23,000 rpm/sec with 100 mm SI wafer

a cProgrammable logic controller (PLC) system controller
a cMax. wafer: 4"(JS401-100), 6"(JS401-150), 8"(JS401-200), 12"(JS401-300)
a cOptional manual PR dispenser, EBR and developer
a cOptional manual wafer alignment tool
a cStandard simultaneous dispense capability expanded upto 4 units(w/ pressure tanks)
-- Photoresist, EBR, HMDS, BSR or Developing

a cSecurity: Vacuum chuck interlock
a cOptional floor type: HEPA filter, Auto damper for exhaust and wafer loading aligned
a cOptional auto dispensing unit available with swing nozzles