Optics Vacuum Coating Plant

Following are the Main Configurations of Optics Vacuum Coating Plant :
1. The vacuum chamber is a vertical type boxed structure with a front door; the box is completely made of stainless steel; dimensions of the internal cavity are I 800mm1200mm.
2. Vacuum System Configuration: with molecular pump(or diffusion pump), Roots pump, mechanical pumps.
3. Deep Cooling System with a Fast Cycle Water Vapor Cryopump
4. Work Piece Rack is an integrated arched shape work piece, can be customized according to the customer.
5. Coating system is equipped with one or two sets of high power e-type 270A magnetic deflection electronic gun scanning in XY directions. The auxiliary metallization system is equipped with a Holl ion source.
6. Baking: Digitally displayed and automatically controlled with a temperature control precision of A 1.5.
7. The film thickness monitoring system can control evaporation rate of the electronic gun. The optical film thickness monitoring system, in which the wave length is controlled within the range of 200-900nm .
8. Control System: The vacuum is controlled by a 10.4 inches color touch screen coupled with a programmable logic controller. The vacuum and coating process are controlled fully automatically.