SensorSHIM Gauge
Measurement Range1000Torr~1.0E-03Torr
Analog OutputStandard
InterfaceRS322 RS422/485
Relay Output8 Setpoints
UnitTorr & Pascal
Measurement Limit1.0E-08 to 1.0E-03 Torr
Cable Length3m-60m
Analog Output1V/decade 0-7VDC
Power Input100/115/230VAC
Power Consumption250 Watts
Frequency50/60Hz
Measurement Range20Torr ~ 1.0E-03Torr
Sensor TypePirani
Input Power80Vac ~ 230Vac
Analog OutputStandard
Relay Setpoints2-setpoints
UnitsTorr & Pascal
TypeMass Flow Controller
MaterialStainless steel
SizeCompact
Accuracy0.2%
Response timeFast
UsageGas flow control in various industries including semiconductor manufacturing gas analysis and research.
Measurement range1Torr ~ 1500Torr
Sensor connectionPiezo
Input power80Vac ~ 230Vac
Analog outputStandard
Relay setpoints2
UnitsPa & Kpa
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