Cr 39 Anti Reflection Coating Machine

Backed by a team of highly skilled professionals, we are the eminent Trader, Exporter, Distributor and Supplier of Cr 39 Anti Reflection Coating Machine in Chengdu, Sichuan, China.
Vacuum chamber size:I 1350mA H1500mm
Orbit&Rotation rotating stand 3-30rpm
Heater:12KW
Vacuum Pumping System:Monoblock pump+Roots pump+Diffusion pump
Evaporation source and power supply:Electron gun 8KW
Resistance evaporation:Single power supply 5KW,evaporation current 500A,time:10 min;
Crucible:2sets,one set 12 holes crucible(right),40CC/hole, crucible diameterI 260mm ;
Jig:Whole spherical,304 stainless steel thickness :3mm
5
Heating system
1.Down heating
2.Heating power:12KW
Temperature uniformity:300a A 5a (heating within 30 min )
Ion source:Hall ion source
Film thickness detector:single probe quartz crystal control system
SQC-310
Control system:PLC control system ,Automatic / manual operation patterns


Digital display compound vacuum gauge GFa c
1 high vacuum gauge,
2 low vacuum gauge, include vacuum gauge pipe and cable


Electric control cabinet:vertical tank, main electrical components pass CE certification and ISO9001 certification .

Gas path system:2 path mass flowmeter
With communication and module ,flow control range 8i 200SCCM
10
water-cooling system:CryogenicTH-135-32A

water-cooling
Temperature 20a -25a

Water pressure alarm linkage control system